Semiconductor Engineering

Curvilinear Masks Push The Limits Of Inspection And Metrology

As high-NA EUV approaches, mask makers need new metrics, model-based checks, and curvilinear-native data flows to keep turn ...
Semiconductor Engineering

How Will The Adoption Of Curvilinear Masks Affect Turnaround Time?

Turnaround time (TAT) for photomask makers has historically increased at smaller and smaller process nodes, as reported in the eBeam Initiative Mask Makers surveys, so it’s important to look at the ...
KHON2

FDA approves decontamination process of N95 masks

WASHINGTON (NEXSTAR) — The federal government is giving the green light to healthcare professionals to safely reuse N95 masks amid shortages of critical medical supplies needed to deal with the ...
EDN

UMC applies chrome-less masks to 90-nm process

HSINCHU, Taiwan — Foundry chipmaker United Microelectronics Corp. said Thursday (December 4, 2003) that it has begun using chrome-less phase-shift masks within its 90-nm manufacturing process. UMC is ...